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Deposition and Etch Vacuum Chamber Solutions

Uncontrolled thermal gradients in a vacuum chamber substantially reduce process repeatability and wafer yields. The harsh environment including chemical, plasma, vacuum and temperature increases material and process contamination. One solution does not work for all vacuum-based applications. Watlow designs metal and ceramic heater and sensor components that are compatible with most vacuum environments.

For lower temperature applications, Watlow’s Polyimide heater construction enables circuits to be designed to extreme tolerances in order to deliver on uniformity requirements. In higher temperature regimes, metal heaters can be incorporated into pedestals, bake stations, wall, lids and other in-chamber applications. Aluminum and higher temperature stainless steel assemblies are also excellent solutions for many CVD, PVD applications.

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